Thin Film Coating Unit

Description

The vacuum chamber is fabricated out of Stainless Steel 304 material with dimensions of 300mm x 400mm each. The D shaped chamber is connected by a SS plumbing line which is connected to the pumping station. A front opening quick access door for loading & unloading of the substrates and materials. Necessary ports required for Pumping, evaporation sources, Gas Inlet, Vent, gauge, feedthrough, port for substrate heaters and rotation mechanism etc. will be provided. One high vacuum compatible, toughened glass view port with a manual shutter to avoid material deposition on the view port on the door. Toughened Glass Window fixed on the front side as per your specification. It made out of SS 304 material by TIG Argon Arc welding and leak tested by Helium Mass Spectrometer leak detector to an individual leak rate better than 1 x 10(-8) std. cc/sec is used as coating chamber with 2 No’s of view port of size 3” fitted with toughened glass to view inside the coating chamber.